منابع مشابه
Advanced mask aligner lithography: new illumination system.
A new illumination system for mask aligner lithography is presented. The illumination system uses two subsequent microlens-based Köhler integrators. The second Köhler integrator is located in the Fourier plane of the first. The new illumination system uncouples the illumination light from the light source and provides excellent uniformity of the light irradiance and the angular spectrum. Spatia...
متن کاملPinhole Mask Sensor a Pinhole Mask Sensor
Figure 1 shows an example of a light field camera with a pinhole mask in front of the sensor. If we look at the sensor in 1D and assume an total x-resolution of 900 pixels and a Θ resolution of 9, the local x resolution is 100. The disadvantages are therefore a loss in resolution and a loss of light, as most of the light gets blocked by the mask. Therefore, while this model is very clean on a t...
متن کاملThe influence of phase mask position upon EDoF system
Special types of pupil mask with the appropriate phase and transmission distribution can be used to modify the 3D pointspread function (PSF) in the desired way. Recently, many studies were addressed to extend the depth-of-field (EDoF) of an imaging system via cubic phase pupil engineering. The intermediate image is detected with a digital sensor and the final image formation is restored by post...
متن کاملLimits of imaging-system simplification using cubic mask wavefront coding.
Increasing the space-bandwidth product of an imaging system will lead to a complex and expensive optical system. Techniques exist to simplify imaging systems. We propose the use of a hybrid imaging system using pupil phase modulation. Based on the reconstructed image's mean-squared error, we compute how this error is affected under various third-order aberrations. We determine the best cubic ph...
متن کاملData collection for the MASK kiosk: WOz vs prototype system
The MASK consortium is developing a prototype multimodal multimedia service kiosk for train travel information and reservation, exploiting state-of-the-art speech technology. In this paper we report on our efforts aimed at evaluating alternative user interface designs and at obtaining acoustic and language modeling data for the spoken language component of the overall system. Simulation methods...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1985
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.51.2213